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Thesis: DUV-Supported Athermal Laser Grooving of Low-κ Dielectrics for AI Chips

Fraunhofer-Gesellschaft

ThesisGerman needed: not said
Still open on 1 Nov

Key facts

Subject you study
Physics, Laser Technology, Semiconductor Manufacturing

What you'll do

  • Investigation of a novel dual-pulse approach for DUV-supported athermal laser grooving
  • Analysis of transient free charge carrier generation by femtosecond DUV pulse
  • Evaluation of controlled, substrate-friendly layer removal

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